真空退火爐設備是(shi)(shi)在(zai)半導(dao)體器件制(zhi)造中使(shi)用的一種工藝(yi)，其包括加熱多(duo)個半導(dao)體晶(jing)片(pian)以影響其電性能(neng)。熱處理是(shi)(shi)針對不(bu)同的效果而設計的。可以加熱晶(jing)片(pian)以激活摻(chan)(chan)雜劑，將(jiang)薄(bo)(bo)膜(mo)(mo)轉(zhuan)(zhuan)換成薄(bo)(bo)膜(mo)(mo)或(huo)將(jiang)薄(bo)(bo)膜(mo)(mo)轉(zhuan)(zhuan)換成晶(jing)片(pian)襯(chen)底界面(mian)，使(shi)致密(mi)沉積的薄(bo)(bo)膜(mo)(mo)，改變生長(chang)的薄(bo)(bo)膜(mo)(mo)的狀(zhuang)態，修復注入的損(sun)傷，移動摻(chan)(chan)雜劑或(huo)將(jiang)摻(chan)(chan)雜劑從一個薄(bo)(bo)膜(mo)(mo)轉(zhuan)(zhuan)移到另一個薄(bo)(bo)膜(mo)(mo)或(huo)從薄(bo)(bo)膜(mo)(mo)進入晶(jing)圓襯(chen)底。

退火爐可(ke)以集(ji)成到其他爐子處(chu)理(li)步驟中，例如氧化，或者可(ke)以自(zi)己處(chu)理(li)。退(tui)火(huo)爐是由專門為(wei)加熱半導體晶片(pian)而設計的設備完(wan)成的。退(tui)火(huo)爐是節能型周期式作業爐，超節能結(jie)構，采用纖維結(jie)構，節電(dian)60%。

退火爐骨(gu)架由(you)各種型鋼(gang)焊(han)接而成，外框用(yong)(yong)槽鋼(gang)作(zuo)主梁，圍(wei)板(ban)(ban)采用(yong)(yong)冷薄板(ban)(ban)，臺車(che)用(yong)(yong)槽鋼(gang)作(zuo)主梁，底板(ban)(ban)及前后(hou)端板(ban)(ban)采用(yong)(yong)中(zhong)板(ban)(ban)。

退火爐傳(chuan)動(dong)(dong)(dong)(dong)部(bu)分：臺車傳(chuan)動(dong)(dong)(dong)(dong)采用電(dian)動(dong)(dong)(dong)(dong)機、減速機通過鏈條帶(dai)動(dong)(dong)(dong)(dong)前端一組主(zhu)動(dong)(dong)(dong)(dong)輪(lun)傳(chuan)動(dong)(dong)(dong)(dong)。爐門傳(chuan)動(dong)(dong)(dong)(dong)是采用蝸輪(lun)減速機和電(dian)動(dong)(dong)(dong)(dong)機組合(he)電(dian)動(dong)(dong)(dong)(dong)升降(jiang)。

密(mi)(mi)封(feng)：臺(tai)車與爐(lu)體密(mi)(mi)封(feng)采用(yong)(yong)迷宮式結構(gou)(gou)，并(bing)在(zai)臺(tai)車兩側有自動(dong)沙封(feng)刀密(mi)(mi)封(feng)裝置。爐(lu)門密(mi)(mi)封(feng)采用(yong)(yong)滾(gun)道(dao)式壓(ya)緊(jin)和彈簧壓(ya)緊(jin)自動(dong)機(ji)構(gou)(gou)密(mi)(mi)封(feng)該爐(lu)爐(lu)體部分采用(yong)(yong)優質(zhi)耐(nai)火磚結構(gou)(gou)，保(bao)證爐(lu)膛(tang)密(mi)(mi)封(feng)性。在(zai)臺(tai)車耐(nai)壓(ya)部分采用(yong)(yong)高(gao)鋁(lv)磚砌筑，下(xia)部均添保(bao)溫磚保(bao)溫。

退火爐燃燒(shao)系統：在(zai)油爐兩側各安裝數只燒(shao)咀，熱流(liu)在(zai)爐內往復循環(huan)，確保爐溫(wen)均勻(yun)性。根(gen)據需要可選定(ding)自動型(xing)和半自動型(xing)。

排(pai)(pai)煙預熱(re)裝置：在(zai)爐(lu)后上端安裝了(le)排(pai)(pai)煙預熱(re)裝置，爐(lu)內(nei)的(de)煙氣通(tong)過(guo)預熱(re)器(qi)時，由(you)風機送入冷(leng)(leng)風進行預熱(re)，再由(you)管路(lu)送至燒咀(ju)進行助燃，并在(zai)出(chu)口安裝一只手(shou)動碟閥(fa)，該閥(fa)可調節(jie)爐(lu)內(nei)壓(ya)力。廣泛應(ying)用于化工(gong)、石油(you)、食(shi)品、冶(ye)金、機械、輕工(gong)、電(dian)力、船舶(bo)、造紙、礦(kuang)山、醫藥、集中供熱(re)等(deng)(deng)工(gong)業部門的(de)加熱(re)、冷(leng)(leng)卻、冷(leng)(leng)凝、蒸(zheng)發等(deng)(deng)工(gong)藝過(guo)程(cheng)中。